Semiconductor Processing Challenges

Solutions

We supply optical emission spectrometers for real-time monitoring and control of semiconductor processes:

Chamber sterilization
Etching
Deposition
Optical endpoint detection
Plasma ashing/cleaning

Advantages of Optical Sensing for Semiconductor Process Monitoring

Real-time measurements
Flexible setups for endpoint detection and more
High stability for reliable performance in process environments

Inspiring Confidence with Experience and Expertise

We have decades of manufacturing experience supporting our semiconductor and industrial partners.
Partnership from prototype to production. We design, optimize, scale and supply.
Fast feasibility testing and evaluation with our Ocean Lab Services team.
Trusted and reliable. We are ISO9001:2015 certified, are part of the Halma FTSE 100 group of companies, and have over 30 years of experience.

Ocean Lab Services

Providing world-class expertise, dedicated facilities and advanced algorithms to provide breakthrough momentum toward project goals.

Spectroscopy-based sensors can be utilized in semiconductor deposition and etching processes, and for chamber sterilization. These tools help to optimize wafer yields and quality.

Benedict Delahunty, Senior Etch Equipment Engineer - GlobalFoundries

Other Case Studies

Semiconductor Solutions For Emerging Electronics

Refining Semiconductor Manufacturing Process

Ocean Insight teamed with GlobalFoundries, a supplier of semiconductor solutions, to improve processes in support of emerging technologies such as 5G and the Internet of Things

Improving Semiconductor Fabrication

Ocean Insight partnered with a leading innovator in plasma-etching technologies, to explore full-spectrum plasma monitoring solutions suitable for detecting critical wafer etch endpoints