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Spectroscopy Solutions for Semiconductor Manufacturing
From plasma monitoring and plasma etching to endpoint detection in semiconductor processing, we offer optical sensing solutions to help with manufacturing processes. The result? Accelerated time to market, higher process yields, and improved product quality.
Monitoring Semiconductor Processes Using Spectroscopy
Learn how spectral tools boost yields and ensure device quality.
Advantages of Optical Sensing
- Real-time measurements
- Flexible setups for different processes
- High stability for reliable performance in process environments
Solutions
- Chamber Sterilization
- Deposition
- Etching
- Endpoint Detection
- Plasma Ashing/Cleaning
Spectroscopy-based sensors can be utilized not only in semiconductor deposition and etching processes, but also for chamber sterilization. These tools help to optimize wafer yields and quality.
Spectrometers to Reduce Downtime, Optimize Output and Improve Quality
High resolution and thermal stability with rapid data acquisition speed
Fast acquisition speed and high SNR
Ultra-compact device with great UV response and high SNR
High-sensitivity, back-thinned CCD spectrometer
